| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for coating abrasion-resistant silicon oxy-carbide.SOLUTION: In the method for coating abrasion-resistant silicon oxy-carbide, a plasma 22 that is an output 20 of an atmospheric plasma device 12 to which a gaseous oxygen stream 14 serving as a plasma source, a precursor stream 16 including a cyclic organosiloxane, and a shielding gas stream 18 including at least one of helium gas and argon gas are supplied is positioned relative to a transparent polymer substrate 24 to form a coating 26. |
