ION BEAM IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent reducing an ion beam quantity involved in substrate processing by facilitating beam current distribution adjustment with a correction device 5.SOLUTION: An ion beam irradiation device IM, having a correction device 5 for beam current distribution adjustment in the lengthwise direction of ion beams IB of a ribbon shape in cross section, includes a convergent lens 4 that converges ion beams IB in the lengthwise direction (Y direction) of the ion beams IB, the lens being positioned on the upstream side of the correction device 5 in a transportation path of the ion beams IB.