METHOD OF IN-LINE DIFFUSION FOR SOLAR CELLS

摘要

A method is provided for the simultaneous diffusion of dopants of different types on respective sides of a solar cell wafer in a single stage process. The dopants are applied to respective sides of the wafer in wet chemical form preferably by pad printing. The doping materials can be applied to the entire wafer surface or effective area thereof, or can be applied in a pattern to suit the intended solar cell configuration. In a typical embodiment, the dopants are boron and phosphorus.

主权项

1. A method of simultaneously diffusing dopants of different types on respective sides of a silicon wafer comprising the steps of:
providing the silicon wafer having a first side and a second side directly opposite the first side; applying a first liquid doping material being of a first type to the first side of the wafer and not applying the first liquid doping material to the second side of the wafer; applying a second liquid doping material being of a second type different from the first type to a second side of the wafer and not applying the second liquid doping material to the first side of the wafer; and heating the wafer to diffuse simultaneously the first liquid doping material into the first side of the wafer and the second liquid doping material into the second side of the wafer.