Method of Fabrication Polymer Waveguide

摘要

A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region.

主权项

1. A device comprising:
a substrate having an electro-interconnection region and a waveguide region; a redistribution metal layer disposed over the substrate in the electro-interconnection region; a passivation layer disposed over the redistribution metal layer in the electro-interconnection region; a reflecting layer disposed over the passivation layer in the electro-interconnection region and over the waveguide region of the substrate; a first cladding layer disposed over the reflecting layer in the waveguide region; a core layer disposed over the first cladding layer in the waveguide region; and a second cladding layer disposed over core layer in the waveguide region.