发明名称 Apparatus for manufacturing ingot and method of manufacturing ingot
摘要 Disclosed are an apparatus for manufacturing an ingot and a method of manufacturing the ingot to control a concentration of dopant. The apparatus for manufacturing an ingot to intermittently or continuously feed silicon while an ingot is grown, includes: a crucible having a melting zone in which the silicon and dopant are melted; an inner wall surrounded by the crucible, and having a growth zone in which the melted silicon and the dopant are introduced so that the ingot is grown in the inner zone; and a feeding unit feeding the silicon into the melting zone, wherein a ratio of a feed rate of the silicon fed through the feeding unit to a growth rate of the ingot is changed.
申请公布号 US2015252491(A1) 申请公布日期 2015.09.10
申请号 US201414257141 申请日期 2014.04.21
申请人 Kwon Hyun Goo;Yoon Yeo Kyun;Son Min Soo 发明人 Kwon Hyun Goo;Yoon Yeo Kyun;Son Min Soo
分类号 C30B15/20;C30B15/00 主分类号 C30B15/20
代理机构 代理人
主权项 1. An apparatus for manufacturing an ingot to intermittently or continuously feed silicon while an ingot is grown, the apparatus comprising: a crucible having a melting zone in which the silicon and dopant are melted; an inner wall surrounded by the crucible, and having a growth zone in which the silicon and the dopant melted in the crucible are introduced so that the ingot is grown in the inner zone; and a feeding unit feeding the silicon into the melting zone, wherein a ratio of a feed rate of the silicon fed through the feeding unit to a growth rate of the ingot is changed.
地址 Uiwang KR