发明名称 METHOD FOR PREPARING SYNTHESIZING NANO-PARTICLES USING PLASMA
摘要 The present invention relates to a preparation method of nanoparticles using plasma and, more particularly, to a preparation method of nanoparticles using plasma which manufactures nanoparticles by having mixed gas of raw gas and sulfur hexafluoride (SF_6) catalyst gas to react in a plasma region, wherein the yield of nanoparticles is improved by the catalyst gas. The preparation method of nanoparticles using plasma can manufacture nanoparticles by using a conventional plasma unit.
申请公布号 KR101552175(B1) 申请公布日期 2015.09.10
申请号 KR20150033956 申请日期 2015.03.11
申请人 SHONANO CO., LTD.;JO, WON IL 发明人 JO, WON IL
分类号 C01B33/021;B01J27/12;B82B3/00;C01G17/00 主分类号 C01B33/021
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