发明名称 |
METHOD FOR PREPARING SYNTHESIZING NANO-PARTICLES USING PLASMA |
摘要 |
The present invention relates to a preparation method of nanoparticles using plasma and, more particularly, to a preparation method of nanoparticles using plasma which manufactures nanoparticles by having mixed gas of raw gas and sulfur hexafluoride (SF_6) catalyst gas to react in a plasma region, wherein the yield of nanoparticles is improved by the catalyst gas. The preparation method of nanoparticles using plasma can manufacture nanoparticles by using a conventional plasma unit. |
申请公布号 |
KR101552175(B1) |
申请公布日期 |
2015.09.10 |
申请号 |
KR20150033956 |
申请日期 |
2015.03.11 |
申请人 |
SHONANO CO., LTD.;JO, WON IL |
发明人 |
JO, WON IL |
分类号 |
C01B33/021;B01J27/12;B82B3/00;C01G17/00 |
主分类号 |
C01B33/021 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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