BIOSENSOR AND MANUFACTURING METHOD THEREOF

摘要

A biosensor according to one embodiment includes a first electrode, a second electrode, a third electrode, a first insulation layer, and a carbon nanotube electrode. The first, the second, and the third electrode are formed on a substrate and include a same layer. The first insulation layer is formed on the substrate so as to cover the first, the second, and the third electrode. The first insulation layer includes a first opening formed to expose at least a part of a surface of the first electrode, a second opening formed to expose at least a part of a surface of the second electrode, and a third opening formed to expose at least a part of a surface of the third electrode. The carbon nanotube electrode is formed inside of the first opening. A part of the carbon nanotube protrudes from a surface of the first insulation layer.

主权项

1. A biosensor comprising:
a first electrode, a second electrode, and a third electrode formed on a substrate, the first electrode, the second electrode, and the third electrode including a same layer; a first insulation layer formed on the substrate so as to cover the first electrode, the second electrode, and the third electrode, the first insulation layer comprising a first opening formed to expose at least a part of a surface of the first electrode, a second opening formed to expose at least a part of a surface of the second electrode, and a third opening formed to expose at least a part of a surface of the third electrode; and a carbon nanotube electrode formed inside of the first opening, a part of the carbon nanotube protruding from a surface of the first insulation layer.