| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid distribution system which has a function of detecting a condition that a supply container is nearly empty, in distributing chemical reagents, e.g. high-purity liquid agents and chemical-mechanical polishing agents, to be used in production of a micro-electronic device products.SOLUTION: A liquid distribution system 400 for distributing coating materials to a wafer 430 includes a dispenser(pump) unit comprising a pressure distribution supply container 402 containing a chemical reagent, a reservoir gas separator 420, a filter 426 and an air pressure bonding section 410, a distribution line 412 and an air pressure valve/sequencing valve(AV/SV tandem valve) 428 and detects a condition that the container is nearly empty by monitoring the time for replenishment to the dispenser unit to which chemical reagents are replenished based on a periodic schedule. The distribution line 412 is provided with a check valve corresponding to the flow of a liquid medium from the liner to the reservoir. |
