PHOTOVOLTAIC DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To enhance photoelectric conversion efficiency of a photovoltaic device.SOLUTION: A photoelectric conversion device includes a crystalline semiconductor substrate 10 having a first surface and a second surface, and an i-type amorphous semiconductor layer 12i formed on the first surface of the semiconductor substrate 10. The interface between the semiconductor substrate 10 and the i-type amorphous semiconductor layer 12i is an oxidized interface containing oxygen at a concentration of 1×10/cmor more. In the i-type amorphous semiconductor layer 12i, a high-concentration oxygen region having an oxygen concentration of 1×10/cmto 1×10/cm(inclusive) is provided in a range of 5 nm or less from the oxidized interface.