| 发明名称 |
Template Substrate, Template, and Method of Fabricating Template Substrate |
| 摘要 |
A template substrate of an embodiment is provided with a substrate portion and a covering portion. The substrate portion is formed of a first light transmitting material. The substrate portion includes a first surface on which a template pattern transferred by imprint is formed and a second surface on a surface side opposed to the first surface on which predetermined work is performed. The covering portion covers at least a part of the second surface with the second light transmitting material. |
| 申请公布号 |
US2015251339(A1) |
申请公布日期 |
2015.09.10 |
| 申请号 |
US201414335275 |
申请日期 |
2014.07.18 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
FURUTONO Yohko |
| 分类号 |
B29C33/38;B29C33/56 |
主分类号 |
B29C33/38 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A template substrate comprising:
a substrate portion formed of a first light transmitting material including a first surface on which a template pattern transferred by imprint is formed and a second surface on a surface side opposed to the first surface on which predetermined working is performed; and a covering portion which covers at least a part of the second surface with a second light transmitting material. |
| 地址 |
Tokyo JP |
