| 摘要 |
<p>The purpose of the present invention is to provide a method for manufacturing a glass substrate wherein charging with electricity can be effectively prevented. The method for manufacturing a glass substrate comprises a cleaning process and an etching process. In the cleaning process, the roughened surface (12b) is cleaned. The roughened surface (12b) is the surface opposite to a device forming surface (12a), which is the surface of a glass substrate (10) where a semiconductor device is formed thereon. In the etching process, the roughened surface (12b) cleaned in the cleaning process is etched. The roughened surface (12b) is cleaned in the cleaning process and etched in the etching process such that surface resistance of the roughened surface (12b) before being etched in the etching process is less than surface resistance of the roughened surface (12b) after being etched in the etching process.</p> |
