发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD, ARRAY SUBSTRATE, DISPLAY DEVICE AND BARRIER LAYER THEREOF
摘要 The present invention discloses a thin-film transistor (TFT), a manufacturing method thereof, an array substrate and a display device. The present invention is used for improving the electrical properties of the TFT and the image quality of the display device. The TFT provided by the present invention comprises: a gate electrode, a source electrode, a drain electrode, a semiconductor layer, a gate electrode insulating layer and a first metal barrier layer, which are disposed on a substrate; the gate electrode insulating layer is disposed between the gate electrode and the semiconductor layer; and the first metal barrier layer is disposed between the source/drain electrodes and the gate electrode insulating layer, and the first metal barrier layer is arranged on the same layer as the semiconductor layer and configured to prevent interdiffusion between the material for forming the source/drain electrodes and the material for forming the gate electrode.
申请公布号 EP2916360(A1) 申请公布日期 2015.09.09
申请号 EP20130821779 申请日期 2013.10.30
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 LIU, XIANG;WANG, GANG
分类号 H01L29/86;G09F9/33;G09F9/35;H01L21/28;H01L21/336;H01L27/12;H01L29/06;H01L29/45;H01L29/49;H01L29/66;H01L29/786 主分类号 H01L29/86
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