发明名称 METHOD FOR MANUFACTURING LAYERED-FILM-BEARING GLASS SUBSTRATE
摘要 <p>A method for manufacturing a laminated film-coated glass substrate in which a laminated film is formed on a glass ribbon by a CVD method by means of a plurality of injectors disposed in the annealing furnace, wherein: the laminated film is formed at Tg+50°C or lower; and in each of the injectors, if a quantity of heat exchanged between the injector and the glass ribbon is expressed by Q1 (kW), a quantity of heat exchanged between a heater paired with the injector and the glass ribbon is expressed by Q2 (kW), and an output of the glass is expressed by P (tons/day), then the relational expression |Q1|-P×0.116‰¤|Q2|‰¤|Q1| is satisfied.</p>
申请公布号 EP2733125(A4) 申请公布日期 2015.09.09
申请号 EP20120810838 申请日期 2012.07.12
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 HIROMATSU KUNIAKI;SHIRAI MASANOBU;MIYASHITA JUNICHI;YONEMICHI TOMOHIRO;ENDO TAKEO
分类号 C03C17/00;C03B25/08;C23C16/40;C23C16/455;C23C16/46;C23C16/52;C23C16/54;H01L31/0392;H01L31/18 主分类号 C03C17/00
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