发明名称 |
METHOD FOR MANUFACTURING LAYERED-FILM-BEARING GLASS SUBSTRATE |
摘要 |
<p>A method for manufacturing a laminated film-coated glass substrate in which a laminated film is formed on a glass ribbon by a CVD method by means of a plurality of injectors disposed in the annealing furnace, wherein: the laminated film is formed at Tg+50°C or lower; and in each of the injectors, if a quantity of heat exchanged between the injector and the glass ribbon is expressed by Q1 (kW), a quantity of heat exchanged between a heater paired with the injector and the glass ribbon is expressed by Q2 (kW), and an output of the glass is expressed by P (tons/day), then the relational expression |Q1|-P×0.116‰¤|Q2|‰¤|Q1| is satisfied.</p> |
申请公布号 |
EP2733125(A4) |
申请公布日期 |
2015.09.09 |
申请号 |
EP20120810838 |
申请日期 |
2012.07.12 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
HIROMATSU KUNIAKI;SHIRAI MASANOBU;MIYASHITA JUNICHI;YONEMICHI TOMOHIRO;ENDO TAKEO |
分类号 |
C03C17/00;C03B25/08;C23C16/40;C23C16/455;C23C16/46;C23C16/52;C23C16/54;H01L31/0392;H01L31/18 |
主分类号 |
C03C17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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