| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a composite seal material that has properties such as vacuum seal performance, plasma resistance, and corrosion resistance gas performance, does not cause the deterioration of the vacuum seal performance for a long period of time, and does not generate metal particles even under a heavy load when used. <P>SOLUTION: A first seal member has a seal body imparted with seal performance by pressure-contacting with the composite seal material when the composite seal material is made to pressure-contact with the seal body, and a first coupling part which is extended to the side of a second seal member from almost the center of the seal body in the axial direction. The second seal member has a spacer and a second coupling part which is extended to the side of the first seal member from both ends of the spacer in the axial direction, and also has connections in which the first seal member and the second seal member are integrated by making the second coupling part of the second seal member engaged with the first coupling part of the first seal member. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
