发明名称 |
IN-TOOL ESD EVENTS MONITORING METHOD AND APPARATUS |
摘要 |
In one embodiment of the invention, an apparatus for electrostatic discharges (ESD) events monitoring incorporating a charged device model event simulator (CDMES) unit comprises: at least one antenna positioned in a process area; an ESD detector coupled to said at least one antenna; said ESD detector wirelessly coupled to said CDMES unit; and said ESD detector calibrated for different discharge energies generated by said CDMES unit. |
申请公布号 |
KR20150103088(A) |
申请公布日期 |
2015.09.09 |
申请号 |
KR20157019982 |
申请日期 |
2013.12.27 |
申请人 |
ILLINOIS TOOL WORKS INC. |
发明人 |
NELSEN LYLE D.;HEYMANN STEVEN B.;HOGSETT MARK E. |
分类号 |
G01R29/12;G01R31/00;G01R31/28;G01R35/00 |
主分类号 |
G01R29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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