| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a shape measuring device capable of efficiently and properly measuring an inner shape of a hole for a tested object having the hole. <P>SOLUTION: An shape measuring device that irradiates an inner surface of a hollow tested object with measurement light, receives the measurement light irradiated to the tested object, and measures a shape of the tested object comprises: a light output part for outputting the measurement light in a line shape irradiated to the tested object; a light reception part that is provided separated from the light output part and detects scattering light of the measurement light received from a predetermined direction; and a control part in which a position of the light reception part is controlled according to a position where the measurement light is detected and a distance to the tested object is calculated according to the distance between an output position of irradiated light and a position of the light reception part. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
