发明名称 化学的に類似している基材の仮接着
摘要 <p>A temporary adhesive for reversibly bonding a silicon wafer to a silicon support contains a crosslinkable organopolysiloxanes composition and a fatty acid or salt thereof or fatty acid ester as a release regulator having a density different from the crosslinkable organopolysiloxanes composition of at least 0.1 g/cm3, which upon parting of the wafer from the substrate, the adhesive remains substantially adhered to the substrate.</p>
申请公布号 JP5774219(B2) 申请公布日期 2015.09.09
申请号 JP20140520611 申请日期 2012.07.11
申请人 发明人
分类号 H01L21/60;C09J5/00;C09J11/06;C09J183/00;H01L21/683 主分类号 H01L21/60
代理机构 代理人
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