| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a downsized, highly productive, low-cost vacuum treatment apparatus in which a long sheet-like substrate S is delivered through a vacuum treatment chamber 1 and is subjected to a prescribed treatment by a treatment unit 3 disposed in the vacuum treatment chamber. <P>SOLUTION: The vacuum treatment apparatus is equipped with: an upstream roller unit 4 that circulates the sheet-like substrate, which is disposed across the treatment unit in the vacuum treatment chamber, while keeping the sheet-like substrate in a position such that one side thereof faces the treatment unit; a flipping means 6 for flipping the sheet-like substrate coming from the upstream roller unit; and a downstream roller unit 5 that is disposed adjacent to the upstream roller unit and perpendicular to the direction in which the sheet-like substrate crosses the treatment unit and circulates the sheet-like substrate flipped by the flipping means while keeping the sheet-like substrate in a position such that the other side thereof faces the treatment unit. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
