发明名称 SCINTILLATOR PANEL MANUFACTURING METHOD, SCINTILLATOR PANEL, AND RADIATION DETECTOR
摘要 Provided is a method of manufacturing a scintillator panel configured to convert radiation into scintillation light, the method including a first process of forming a plurality of convex sections that protrude from a rear surface toward a front surface of the substrate in a predetermined direction and concave section defined by the convex sections on the front surface of the substrate having the front surface and the rear surface, a second process of forming first scintillator units respectively extending from the convex sections of the substrate in the predetermined direction through crystal growth of a columnar crystal of a scintillator material, and a third process of radiating a laser beam to contact portions of the first scintillator units extending from the adjacent convex sections and separating the first scintillator units extending from the adjacent convex sections by scanning the concave section with the laser beam.
申请公布号 KR20150103042(A) 申请公布日期 2015.09.09
申请号 KR20157018040 申请日期 2013.11.05
申请人 HAMAMATSU PHOTONICS K.K. 发明人 YAMASHITA MASANORI;KUSUYAMA YUTAKA;TOYAMA SHINTARO;OSAWA HIROTAKE;SUZUKI KATSUHIKO
分类号 G01T1/202;G21K4/00;H01L27/146 主分类号 G01T1/202
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