| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a graphite crucible for single crystal pulling devices allowing prolongation of the service lifetime and its manufacturing method. <P>SOLUTION: The graphite crucible 2 holding a quartz crucible 1 includes a graphite crucible substrate 3 as a graphite crucible formed body and a film 4 formed on the whole surface of the graphite crucible substrate 3 and composed of a carbonized phenol resin. The phenol resin is impregnated into the insides of open pores 5 present in the surface of the graphite crucible substrate 3. The film 4 may be formed on the whole surface of the graphite crucible or only in such areas of the surface where conversion into SiC easily advances. More specifically, the film may be precipitated entirely on the inside surface of the crucible, merely on a bent portion, or small R portion, of the inside surface or merely on the bent portion and a straight body portion. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
