发明名称 POLISHING COMPOSITION
摘要 [Abstract] Provided is a polishing composition with which a high glossy surface is achieved by enhancing smoothness of a surface of an alloy material while maintaining a sufficiently high polishing speed for the alloy material. The present invention relates to a polishing composition used for an application of polishing an alloy material, which contains silica particles having a primary particle average aspect ratio of at least 1.10 and a pH controlling agent.
申请公布号 EP2915859(A1) 申请公布日期 2015.09.09
申请号 EP20130850813 申请日期 2013.06.25
申请人 FUJIMI INCORPORATED 发明人 TAMAI, KAZUSEI;ASAI, MAIKO;MORINAGA, HITOSHI
分类号 C09K3/14;B24B37/00;C09G1/02 主分类号 C09K3/14
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