Structure with seed layer for controlling grain growth and crystallographic orientation

摘要

According to one embodiment, a structure includes a substrate; an epitaxial seed layer positioned above the substrate, the epitaxial seed layer including a plurality of nucleation regions and a plurality of non-nucleation regions; and a crystalline layer positioned above the epitaxial seed layer, where the epitaxial seed layer has a crystallographic orientation substantially along an axis perpendicular to an upper surface of the substrate.