发明名称 検査方法
摘要 <p>PROBLEM TO BE SOLVED: To provide a new inspection device.SOLUTION: The inspection device includes: an illumination device for irradiating an imaging object with light; an imaging device for receiving reflected light from the imaging object based on the irradiation of light; and an imaging element existing in the imaging device for receiving the reflected light. Also, the inspection device is configured to acquire one or both of a two-dimensional image and a three-dimensional image of the imaging object. A polarizer is installed between the illumination device and the imaging object, and an analyzer is installed between the imaging object and the imaging device. Thus, it is possible to suppress the generation of a region which is difficult to identify in one or both of the two-dimensional image and the three-dimensional image.</p>
申请公布号 JP5776949(B2) 申请公布日期 2015.09.09
申请号 JP20130271567 申请日期 2013.12.27
申请人 发明人
分类号 G01B11/30;G01N21/956 主分类号 G01B11/30
代理机构 代理人
主权项
地址