Thermal flow sensor with a membrane supported by nanowires

摘要

The sensor has a membrane (2) that is suspended relative to support by four nanowires (12.1,12.2,14.1,14.2). The membrane is made from current-conducting material. The nanowires are made from a current-conducting material. The two nanowires are connected to a current source to polarize membrane between two terminals. A heater is provided to heat membrane. The two nanowires are connected to a device to measure voltage at the terminals of membrane. The nanowires are made of N-or P-doped silicon and germanium. Independent claims are included for the following: (1) a system for determining concentration of gaseous environment; and (2) a device for analyzing gas or blend of gases.