Wavelength-tunable interference filter, optical module, and optical analysis apparatus

摘要

A wavelength-tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, a second reflective film provided on the second substrate, the second reflective film facing the first reflective film, a first electrode provided on the first substrate, and a second electrode provided on the second substrate, the second electrode facing the first electrode, wherein the first electrode includes a first electrode layer and a second electrode layer, the first electrode layer has a first in-plane internal stress which is compressive, and the second electrode layer has a second in-plane internal stress which is tensile.

主权项

1. A wavelength-tunable interference filter comprising:
a first substrate; a second substrate facing the first substrate; a first reflective film provided on the first substrate; a second reflective film provided on the second substrate, the second reflective film facing the first reflective film; a first electrode provided on the first substrate, the first electrode provided at an outer periphery of the first reflective film; and a second electrode provided on the second substrate, the second electrode facing the first electrode, wherein the first electrode is configured by stacking a first electrode layer, a second electrode layer and a third electrode layer in series, the first electrode layer has a first in-plane internal stress which is compressive, the first electrode layer is a metal oxide film and conductive, the second electrode layer has a second in-plane internal stress which is tensile, the second electrode layer is a metal film, and the third electrode layer has a third in-plane internal stress which is tensile, the third electrode layer is a metal film which is different from the second electrode layer.