| 发明名称 | Actuator and optical scanning apparatus | ||
| 摘要 | An actuator includes a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode. The insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring. | ||
| 申请公布号 | US9130146(B2) | 申请公布日期 | 2015.09.08 |
| 申请号 | US201213625063 | 申请日期 | 2012.09.24 |
| 申请人 | MITSUMI ELECTRIC CO., LTD. | 发明人 | Sekine Hisamichi;Aga Hisanori;Maruyama Yuki |
| 分类号 | G02B26/08;H01L41/047;H01L41/08 | 主分类号 | G02B26/08 |
| 代理机构 | IPUSA, PLLC | 代理人 | IPUSA, PLLC |
| 主权项 | 1. An actuator, comprising: a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode, wherein the insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring, and the insulating part includes an inorganic insulating film and an organic insulating film. | ||
| 地址 | Tokyo JP | ||