Cleaning method

摘要

Disclosed is a low-cost and resource-saving cleaning method wherein high cleaning effects are obtained by high-pressure jet cleaning or two-fluid cleaning using a gas-dissolved water. In the high-pressure jet cleaning method or the two-fluid cleaning method, a cleaning liquid or a mixed fluid of the cleaning liquid and a gas is jetted from a cleaning fluid jetting nozzle toward a subject to be cleaned, and the subject is cleaned. The cleaning liquid introduced into the cleaning fluid jetting nozzle contains the dissolved gas in a quantity equal to or more than the saturation solubility at the liquid temperature of the cleaning liquid.

主权项

1. A cleaning method by high-pressure jet cleaning or two-fluid cleaning, comprising:
a step of jetting a cleaning liquid or a mixed fluid of the cleaning liquid and a carrier gas from a jetting nozzle toward a subject of an electronic material to be cleaned and thereby cleaning the subject, wherein the cleaning liquid is at room temperature, the cleaning liquid introduced into the jetting nozzle contains a dissolved gas prepared by dissolving a gas in degassed water with a gas-dissolving membrane module in a quantity of 1.5 to 3 times as large as a saturation solubility at a temperature of the cleaning liquid, a pressure in a feed water piping connecting the gas-dissolving membrane module and the jetting nozzle is controlled thereby to prevent generation of bubbles in the cleaning liquid, the gas is supplied to a gas-phase room of the gas-dissolving membrane module through a gas supply piping having a gas flow regulating valve, the gas-phase room has a first pressure indicator measuring a pressure V1 in the gas-phase room, the feed water piping has a feed water regulating valve and a second pressure indicator measuring a water feed pressure V2 at a downstream side relative to the feed water regulating valve, and V1