Vacuum pumping arrangement

摘要

A vacuum pumping arrangement for evacuating an enclosure is provided. The arrangement comprises a turbomolecular vacuum pump having an inlet which is connectable using fixing members to an outlet of an enclosure to be evacuated. Each of the fixing members passes through a first aperture in the inlet and through a second aperture in the outlet. An elongate, circumferentially extending cavity is provided extending from or adjacent to one of these apertures to accommodate a crushable insert. Energy transmitted to the fixing members by the turbomolecular vacuum pump during a failure thereof is thus absorbed by the deformation of the inserts. By absorbing a proportion of the energy in this way separation of the inlet from the outlet is thus inhibited.

主权项

1. A vacuum pumping arrangement for evacuating an enclosure, the arrangement comprising:
a turbomolecular vacuum pump having an inlet connectable to an outlet of an enclosure using fixing members wherein each of the fixing members passes through a respective first aperture in the inlet and through a respective second aperture in the outlet, the inlet or the outlet comprising an elongate, circumferentially extending cavity extending from or adjacent to the respective aperture, and a crushable insert having an elongate shape that is inserted within the circumferentially extending cavity so as to substantially fill the circumferentially extending cavity and so that energy transmitted to the fixing memgers by the turbomolecular vacuum pump during a failure thereof is absorbed by crushing the crushable insert in the circumferentially extending cavity to reduce damage to the inlet and the outlet during the failure wherein the crushable insert has a progressive resistive property such that as a degree of deformation of the crushable insert is increased, resistance to further deformation of the crushable insert increases; wherein the crushable insert is formed of a plastic honeycomb structure surrounded by an external skin.