Laser-enhanced chemical etching of nanotips

摘要

A method for sharpening a nanotip involving a laser-enhanced chemical etching is provided. The method includes immersing a nanotip in an etchant solution. The nanotip includes a base and an apex, the apex having a diameter smaller than a diameter of the base. The method also includes irradiating the nanotip with laser fluence to establish a temperature gradient in the nanotip along a direction from the apex to the base of the nanotip such that the apex and base are etched at different rates.

主权项

1. A method of forming an integrated circuit (IC) device, comprising:
sharpening a nanotip, the sharpening comprising:
immersing the nanotip in an etchant, the nanotip comprising a base and an apex, the apex having a diameter smaller than a diameter of the base, andirradiating the nanotip with laser fluence to establish a temperature gradient in the nanotip along a direction from the apex to the base of the nanotip such that the apex and base are etched at different rates; performing wafer metrology on a wafer having a plurality of devices using the sharpened nanotip to measure device performance.