Apparatus for generating/detecting terahertz wave using graphene and manufacturing method of the same

摘要

Provided is a terahertz wave generating/detecting apparatus and a method for manufacturing the same. The terahertz wave generating/detecting apparatus includes; a substrate having an active region and a transmitting region; a lower metal layer extending in a first direction on the active region and the transmitting region of the substrate; a graphene layer disposed on the lower metal layer on the active region; and upper metal layers extending in the first direction on the graphene layer of the active region and the substrate in the transmission region, wherein a terahertz wave is generated or amplified by a surface plasmon polariton that is induced on a boundary surface between the graphene layer and the lower metal layer by beated laser light applied to the graphene layer and the metal layer.

主权项

1. A terahertz wave generating/detecting apparatus comprising:
a substrate including an active region and a transmitting region; a lower metal layer extending in a first direction and disposed on the active region and the transmitting region of the substrate; a graphene layer disposed on a portion of the lower metal layer disposed on the active region of the substrate; a plurality of upper metal layers extending in the first direction and disposed on the graphene layer and the transmitting region of the substrate; and a dielectric layer disposed on the graphene layer and between two adjacent upper metal layers, wherein a terahertz wave is generated or amplified by a surface plasmon polariton that is induced on a boundary surface between the graphene layer and the lower metal layer when beat laser light is applied to the graphene layer and the lower metal layer.