Amorphous oxide and field effect transistor

摘要

A novel amorphous oxide applicable, for example, to an active layer of a TFT is provided. The amorphous oxide comprises microcrystals.

主权项

1. A field effect transistor comprising:
a gate electrode, a gate insulator, and an active layer of an amorphous oxide selected from the group consisting of an amorphous oxide containing In, Zn and Sn; an amorphous oxide containing In and Zn; an amorphous oxide containing In and Sn; an amorphous oxide containing In; and an amorphous oxide containing In, Ga and Zn, wherein the active layer has a composition varying in a layer thickness direction such that the concentration of at least one of In, Zn and oxygen is higher in the region close to the gate insulator than in the region away from the gate insulator, and wherein the active layer has an electron carrier concentration of 1012/cm3 or more and less than 1018/cm3.