Bonded body of ceramic member and metal member and method for manufacturing the same

摘要

A bonded body 10 includes a plate-shaped alumina or aluminum nitride ceramic member 12 and a Mo or Ti terminal 14 having a Ni coating, a Au coating, or a Ni—Au coating (Au on Ni) and joined to a recess 12a in the ceramic member 12 with a joint layer 16 therebetween. The joint layer 16 contains Au, Ge, Ag, Cu, and Ti and is in contact with at least part of the side surfaces (herein the entire side surfaces) and the bottom surface of the recess 12a. Ti is rich in the joint interface between the joint layer 16 and the ceramic member 12. The percentage (porosity) of the sum of the cross-sectional areas of pores to the cross-sectional area of the joint layer 16 in a cross-section taken across the thickness of the bonded body 10 is 0.1% to 15%.

主权项

1. A bonded body comprising an alumina or aluminum nitride ceramic member and a metal member comprising Mo or Ti and having a Ni coating, a Au coating, or a Ni—Au coating, the metal member being joined to a recess in the ceramic member with a joint layer therebetween,
wherein the joint layer contains Au, Ge, Ag, Cu, and Ti and is in contact with a bottom surface and at least part of a side surface of the recess, Ti is rich in one side of the joint layer, the one side being near a joint interface between the joint layer and the ceramic member, and the percentage of the sum of the cross-sectional areas of pores to the cross-sectional area of the joint layer in a cross-section taken across the thickness of the bonded body is 0.1% to 15%.