Treatment device, treatment method, and surface treatment jig

摘要

The treatment device 100 of the present invention is a treatment device for carrying out treatment to a treatment object 18 whose treatment surface includes a second treatment surface 18b and a first treatment surface 18a surrounding the second treatment surface 18b, the treatment device including: a table section 10 for placing the treatment object 18 thereon; and a first feeding section 24 for feeding a first treatment liquid to an approximate boundary between the first and the second treatment surfaces 18a, 18b and a second feeding section 46 for feeding a second treatment liquid to the second treatment surface 18b. Thus, the present invention provides a treatment device, a treatment method, and a surface treatment jig, each of the treatment device and the treatment method being capable of carrying out independent treatments to a treatment surface and an exposed surface surrounding the treatment surface, respectively.

主权项

1. A treatment device for carrying out treatment to a treatment object whose treatment surface includes a second treatment surface and a first treatment surface surrounding the second treatment surface, the treatment device comprising:
a table section for placing the treatment object thereon; a treatment nozzle that includes a first feeding section for feeding a first treatment liquid to an approximate boundary between the first and the second treatment surfaces, and a second feeding section for feeding a second treatment liquid to the second treatment surface; and a preparation treatment nozzle for carrying out preparation treatment to the second treatment surface, the preparation treatment nozzle having a treatment section having a surface facing the treatment object, a plurality of through-holes in the treatment section extending through the surface, and a protrusion only on an edge part of the surface, wherein at least one of the plurality of through-holes is a hole via which a treatment solution is collected and another at least one of the plurality of through-holes is a hole via which the treatment solution is fed.