Methods for manufacturing three-dimensional devices and devices created thereby

摘要

In certain exemplary embodiments of the present invention, three-dimensional micro-mechanical devices and/or micro-structures can be made using a production casting process. As part of this process, an intermediate mold can be made from or derived from a precision stack lamination and used to fabricate the devices and/or structures. Further, the micro-devices and/or micro-structures can be fabricated on planar or nonplanar surfaces through use of a series of production casting processes and intermediate molds. The use of precision stack lamination can allow the fabrication of high aspect ratio structures. Moreover, via certain molding and/or casting materials, molds having cavities with protruding undercuts also can be fabricated.

主权项

1. A system comprising:
a metallic foil stack lamination mold; and a first silicone part that fills a cavity of said metallic foil stack lamination mold; wherein:
said first silicone part defines a protruding undercut and a plurality of surfaces that define a periphery of a solid layerless volume of said first silicone part;a surface from said plurality of surfaces comprises a plurality of 3-dimensional micro-features,said surface is a substantially spatially inverted replica of a stack lamination mold surface formed by a bonded stacked plurality of metallic foil layers comprised by said metallic foil stack lamination mold;said cavity defines a single demolding opening for said metallic foil stack lamination mold;said demolding opening defines a demolding direction in which said first silicone part is removable via said demolding opening from said cavity of said mold with damage to neither said first silicone part nor said metallic foil stack lamination mold;said cavity defines a first cavity cross-sectional area that extends solely within a first cavity plane that is oriented perpendicularly to said demolding direction;said cavity defines a second cavity cross-sectional area that extends solely within a second cavity plane that is oriented perpendicularly to said demolding direction;said first cavity cross-sectional area is smaller than said second cavity cross-sectional area; andsaid first cavity plane is closer to said demolding opening than said second cavity plane.