Charged particle beam apparatus

摘要

In many cases, the charged particle beam apparatus is used basically for observation at a magnification of 10,000 times or higher. It is thus difficult to recognize how the orientation of a sample seen with the naked eye corresponds to the origination of the sample appearing on an acquired image. This makes it difficult intuitively to grasp the tilt direction and other details of the sample. An object of this invention is to provide a charged particle beam apparatus allowing the orientation and the tilted state of the sample to be grasped intuitively. The apparatus includes: a charged particle beam source that emits a charged particle beam; a charged particle beam optical system that irradiates the sample with the charged particle beam; a platform on which the sample is placed; a stage capable of moving the platform at least in a tilt direction; a display unit that displays a tilted state of the platform by use of a simulated image of the platform; an operation input unit that allows a user to designate the position and direction of the sample for observation; and a control unit that controls the amount of movement of the stage based on a signal input from the operation input unit.

主权项

1. A charged particle beam apparatus comprising:
a charged particle beam source that emits a charged particle beam; a charged particle beam optical system that irradiates a sample with the charged particle beam; a platform on which the sample is placed; a stage capable of moving the platform in a parallel, tilted, and rotation manner, the stage having a tilted axis; a display unit that displays an observation image of the sample, a simulated image of the platform to represent a tilted state and an observation target portion of the platform, and a two-dimensional display of the platform; an operation input unit capable for desirably setting the tilted axis and a tilted angle on the simulated image; and a control unit for matching the tilted axis of the stage with the tilted axis of the simulation image by moving the platform in a parallel and rotation manner of the stage based on signals inputted from the operation input unit, the control unit matching a tilted angle of the stage with a tilted angle of the simulated image, the control unit executing raster rotation of the stage in a reverse direction with the rotation angle executed for matching the tilted axis of the stage with the tilted axis of the simulated image, so that only a direction of a center line of tilting of the platform is changed on the observation image without the stage actually rotating, wherein a warning is issued if a state of the stage does not match a state indicated by the simulated image of the platform.