发明名称 COMPOSITION FOR PHOTORESIST STRIPPER
摘要 <p>The present invention relates to a photoresist stripping liquid composition. More specifically, provided is a photoresist stripping liquid composition comprising at least two species of an alkylene glycol-tertiary-butyl ether-based compound, which can minimize damage to an insulation body, with an excellent removal rate of a photoresist.</p>
申请公布号 KR20150102354(A) 申请公布日期 2015.09.07
申请号 KR20140024119 申请日期 2014.02.28
申请人 ENF TECHNOLOGY CO., LTD. 发明人 LEE, SANG DAI;PARK, YOUNG JIN;JEON, KYEONG MIN;LIM, CHAN KYU
分类号 G03F7/42;H01L21/027 主分类号 G03F7/42
代理机构 代理人
主权项
地址