| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical module capable of maintaining small variations in wavelengths of light that an interference filter transmits.SOLUTION: An optical module includes: an interference filter 12 including a movable substrate 13 on which a movable reflection film is provided, a fixed substrate 14 on which a fixed reflection film opposed to the movable reflection film is provided, and an electrostatic actuator for controlling an interval between the movable reflection film and the fixed reflection film; a housing 2 having an internal space 11 for accommodating the interference filter 12; a second lid body 9 that is connected with the housing 2 and seals the internal space 11; and a stationary portion 29 for fixing the interference filter 12 against the second lid body 9. A material of the movable substrate 13, fixed substrate 14, second lid body 9, and stationary portion 29 is mainly composed of silicate glass.</p> |
