| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform shape measurement using wavelength scan under a vibration environment.SOLUTION: The present invention regards a pixel having the largest difference between the largest light intensity and the smallest light intensity as a first measurement pixel per pixel regarding a plurality of images, identifies an image of which the first measurement pixel is half of the sum of the largest light intensity and the smallest light intensity, regards a pixel having the largest light intensity as a second measurement pixel, calculates the amount of phase shift of a plurality of extracted images making the first measurement pixel and the second measurement pixel as one set of measurement points, and calculates the phase of a speckle interference image of all pixels in one image by using the least square approximation of a light intensity change relative to the phase shift. The present invention uses first specific wavelength and second specific wavelength as specific wavelength, calculates the amount of phase shift between the phase of the speckle interference image calculated regarding the first specific wavelength and the phase of the speckle interference image calculated regarding the second specific wavelength, and calculates the height of a rough surface of a measurement object 20 from the amount of wavelength change and the amount of phase shift between the first specific wavelength and the second specific wavelength.</p> |
