| 摘要 |
PROBLEM TO BE SOLVED: To provide an image measurement instrument capable of stably extracting an edge.SOLUTION: An image measurement instrument has a light quantity distribution that abruptly changes in the direction of a photography axis. The image measurement instrument includes: a side illumination device for illuminating a work on a movable stage from a side direction; a measurement object place designation section 23 for designating a measurement object place for a work image; an illumination position adjustment section for adjusting a relative position of the side illumination device for the movable stage by moving the side illumination device in the direction of a photography axis; a relative position specifying section 25 for obtaining a brightness variation inside the measurement object place and specifying the relative position with respect to two or more work images captured by making the relative position different; an imaging control section 21 for controlling the illumination position adjustment section on the basis of the specified relative position and obtaining the work image by driving the side illumination device; and a dimension measurement section 26 for extracting an edge of the measurement object place on the basis of the acquired work image and acquiring the dimension of the measurement object place on the basis of the extracted edge. |
