发明名称 SURFACE GRINDING METHOD OF WORK-PIECE
摘要 PROBLEM TO BE SOLVED: To provide a surface grinding method of a work-piece, with which a work-piece such as a hard and fragile material and a hardly machinable material can be epochally accurately machined and a machining rate is significantly improved.SOLUTION: When grinding a work-piece W by a cup type grindstone 3 while supplying slurry 5 including an abrasive grain, the grindstone 3 is rotated at low peripheral speed. The peripheral speed of the grindstone 3 is suitably 500 m/min or less, and is desirably 30-430 m/min. The slurry 5 is dripped or sprayed little by little on a grinding surface of the work-piece W at a flow rate of 4.0 ml/cm/h or less, and desirably at a flow rate of 1.0-2.0 ml/cm/h.
申请公布号 JP2015160249(A) 申请公布日期 2015.09.07
申请号 JP20140034659 申请日期 2014.02.25
申请人 KOYO MACH IND CO LTD 发明人 HIRAYAMA HARUYUKI;YUSO KAZUHIRO
分类号 B24B7/04;B24B7/22;B24B57/02;H01L21/304 主分类号 B24B7/04
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