EFFICIENT HOLLOW CATHODE AND POWER SUPPLY

摘要

The present invention relates to a high efficiency hollow cathode and a cathode system using the same. The hollow cathode includes a tube which comprises at least two refractory metal parts; a gate supply part and a gas outlet which are formed at the end of the tube; an insert which is installed in the tube. According to the present invention, thermal stability, lifespan, and efficiency can be increased by forming a hollow cathode by using at least two materials. Thereby, costs can be reduced.