METHOD FOR IMPROVING CHEMICAL RESISTANCE OF POLYMERIZED FILM, POLYMERIZED FILM FORMING METHOD, FILM FORMING APPARATUS, AND ELECTRONIC PRODUCT MANUFACTURING METHOD

摘要

The present invention provides a method for improving chemical resistance of a polymerized film, which requires no separate processing device for improving the chemical resistance of the polymerized film. The method for improving the chemical resistance of the polymerized film according to an embodiment of the present invention improves the chemical resistance of the polymerized film formed on the surface of an object to be processed, and processed by chemical treatment, wherein the process of improving the chemical resistance of the polymerized film is continuously performed with a process of forming the polymerized film in a process chamber without taking out the object to be processed from the process chamber of a film forming apparatus forming the polymerized film.