| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for producing hydroxyl radical-containing water which can be easily controlled at lower cost when supplying hydroxyl radical-containing water to a plurality of processing apparatuses. ! SOLUTION: There is provided a hydroxyl radical-containing water production apparatus 10 capable of supplying hydroxyl radical-containing water to a plurality of processing apparatuses 100 which comprises an ozone water supply section 54, a plurality of hydrogen peroxide mixture sections 60 provided on the downstream of the ozone water supply section, a hydroxy radical measuring apparatus 70 for measuring the concentration of radical species containing at least hydroxyl radical on the downstream of the individual hydrogen peroxide mixture sections and a hydrogen peroxide control section 75 for controlling the amount of hydrogen peroxide supplied to the individual hydrogen peroxide mixture sections based on the measured concentration of the radical species containing |
