| 发明名称 |
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME |
| 摘要 |
Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole. |
| 申请公布号 |
US2015248944(A1) |
申请公布日期 |
2015.09.03 |
| 申请号 |
US201514607736 |
申请日期 |
2015.01.28 |
| 申请人 |
Hitachi High-Technologies Corporation |
发明人 |
Cheng Zhaohui;Kashima Hideo;Baba Hiroaki;Ohashi Takeyoshi;Nakano Tomonori;Urano Kotoko;Suzuki Naomasa |
| 分类号 |
G21K1/093;H01J37/153 |
主分类号 |
G21K1/093 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An aberration corrector, comprising:
a plurality of magnetic field type poles; a ring that magnetically connects the plurality of poles with one another, and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole. |
| 地址 |
Tokyo JP |
