LIGHT FILTER, OPTICAL MODULE, AND ELECTRONIC DEVICE

摘要

A light filter includes a fixed substrate, a movable portion which is arranged to face the fixed substrate, a fixed reflective film which is disposed on the fixed substrate, and reflects a part of light and transmits a part of the light, a movable reflective film which is disposed on the movable portion to face the fixed reflective film, and reflects a part of the light and transmits a part of the light, and an electrostatic actuator which controls a distance between the fixed reflective film and the movable reflective film, the fixed reflective film is interposed between a conductive film and a protective film, and the conductive film and the protective film are formed of the same material, and have the same film thickness.

主权项

1. A light filter, comprising:
a fixed substrate; a movable portion which is arranged to face the fixed substrate; a first reflective film which is disposed on the fixed substrate; a second reflective film which is disposed on the movable portion and faces the first reflective film; and a distance control unit which controls a distance between the first reflective film and the second reflective film, wherein at least one of the first reflective film and the second reflective film is interposed between a first conductive film and a second conductive film, and the first conductive film and the second conductive film are formed of the same material and have the same film thickness.