DIRECT CONNECTED TYPE OF REAL TIME MONITORING TROUBLE PREDICTION AND DIAGNOSIS APPARATUS IN EQUIPMENT AND THEREOF TROUBLE DIAGNOSIS AND PREDICTION METHOD

摘要

In the present invention, disclosed are real-time monitoring trouble diagnosis and prediction apparatuses. A diagnosis method of the trouble diagnosis apparatus includes the steps of: generating digital sensing data by receiving a sensing signal provided from at least two sensors or more to sense the operation state of a component of the corresponding manufacturing equipment with the trouble; comparing and analyzing data obtained from the component interlocked on the recipe of the corresponding manufacturing equipment among the digital sensing data in a real-time monitoring period; generating trouble diagnosis data including trouble component information through the result of the comparison and analysis; and displaying or transmitting the trouble diagnosis data to the outside.