| 摘要 |
In the method for producing a component, firstly a first layer composite is created which comprises a first substrate made of a conductive material and at least one trench formed therein and filled with insulating material, wherein a first region of the first substrate, at least on a first surface of the first substrate, is electrically insulated laterally from other regions of the first substrate by the trench. A second layer composite is then created, which comprises the first layer composite and a structure layer. The structure layer comprises an active structure of the component and is electrically conductive at least in a first region which in a first region of the first substrate adjoins the first surface of the first substrate and is connected thereto in an electrically conductive manner. On a second surface of the first substrate, which is located opposite the first surface of the first substrate, a first contact face is then created in the first region of the first substrate, wherein the first region of the first substrate is electrically insulated laterally from other regions of the first substrate by the trench on the second surface of the first substrate. By virtue of the method, a component is obtained in which an electrical contact to the first region of a structure layer is possible by means of the first region of the first substrate and the first contact face. |
