| 摘要 |
PROBLEM TO BE SOLVED: To provide a group 13 nitride crystal having a large diameter and little warpage, and to provide a group 13 nitride crystal substrate.SOLUTION: A group 13 nitride crystal, which is a group 13 nitride crystal of a hexagonal crystal, contains a plurality of hexagonal domains in which a region having many crystal defects is used as a boundary in a c-surface. The interval between each parallel side among the sides of a hexagon is 1 mm or more, and a silicon concentration in the crystal is less than 2×10cm, and the crystal has an outer diameter larger than 2 inches. |
