| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter device in which bonding strength of a glass substrate fixed to an opening of a chassis can be enhanced, an optical module, and electronic equipment. ! SOLUTION: An optical filter device 600 includes: a wavelength variable interference filter 5 having a pair of reflection films opposing to each other; a chassis 610 that stores the wavelength variable interference filter 5 inside and has a second opening 628 where light to be incident to the wavelength variable interference filter 5 passes through; a lid 630 (glass substrate) that covers the second opening 628; and a second joining member 642 that joins the chassis 610 and a joining region A6 of the lid 630. The lid 630 has a second rugged part 630A in at least the joining region A6. ! COPYRIGHT: (C)2015,JPO&INPIT |
