OPTICAL SPECTRUM ANALYSIS METHOD

摘要

This optical spectrum analysis method involves: calculating a principal component for a plurality of degrees configuring each optical spectrum, by principal component analysis of a set of optical spectrums measured at each specimen location (S12); generating, for each degree, a principal component image in which a principal component score for each principal component is set as a value for the corresponding location (S13); extracting a distribution pattern for the principal component scores from the principal component images (S14); extracting the shape of the specimen from the shape image in which the specimen is captured (S22); extracting a principal component image in which the distribution pattern of principal component scores is correlated with the specimen shape (S31); and reconstructing each optical spectrum by using the principal components for the degrees corresponding to the degrees of the extracted principal component images (S32).